Study of Optical and Electrical Properties of TiO2/Ag/TiO2 Multilayers

JH Jia,P Zhou,H Xie,HY You,J Li,LY Chen
DOI: https://doi.org/10.3938/jkps.44.717
2004-01-01
Journal of the Korean Physical Society
Abstract:Optical and electrical properties of TiO2/Ag/TiO2 multifilms prepared by a, multi-target sputtering method were investigated. The transmittance spectra, and the sheet resistance as a function of layer thickness were carefully measured and analyzed. By properly adjusting the thickness of the metal and dielectric films, a low sheet resistance of 30 Ohms/sq. and a high transmittance of over 90 % in the 500-700 nm wavelength region were achieved. It was found that a Ag layer played a, significant role in determining the optical and electrical properties of the film structure.
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