Investigations of room temperature nanoporous alumina humidity sensor

张会锐,张辉,杨青,张年生,杨德仁
DOI: https://doi.org/10.3785/j.issn.1008-973X.2004.04.007
2004-01-01
Abstract:A humidity sensor based on porous alumina was investigated. The porous alumina was fabricated using electronic chemical etching. An LCR instrument was used to measure the capacitance and impedance characteristics related with relative humidity (RH). The results indicated that the capacitance and impedance characteristics had excellent linearity. The complex impedance characteristic was analyzed by means of an equivalent circuit model. It is concluded that the sensor is equivalent to an R/C parallel circuit and conducts mainly through electrons at low RH, while two R/C parallel circuits in series and conducts through ion at high RH.
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