Limitation of Scalar Method to the Analysis and Design of Diffractive Optics Elements

陈德伟,李永平
DOI: https://doi.org/10.3969/j.issn.1003-501x.2004.06.003
2004-01-01
Abstract:The limitation of scalar method for diffractive grating is evaluated by comparison with rigorous coupled-wave analysis. The accuracy of scalar method degrades as the grating period decreases or as the etch depth, the refractive index and the incident angle increases, or as the filling factor departs from 50%. The effects of the grating period and the etch depth are most serious , when the grating period is less than 5 times of wavelength or the etch depth is larger than 5 times of wavelength, the scalar method can not be applied to the analysis of DOE(Diffractive Optics Elements). The results are applicable to non-periodic as well as periodic elements.
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