Abstract:The method for designing diffractive microlens with micro-nano-scale structural features, through iterative angular spectrum algorithm, and fabricating diffractive microlens by single-step photolithography and a wet etching process, based on standard micro-nano-technology, was presented. Surface morphology testing shows that the diffractive microlens fabricated is composed of multi-step continuous relief structures with the feature height in the micrometer range, the distribution of the surface micro-nano-structures is circular symmetry, and the transition between the circular rings is smooth. A large number of fine structures with micro-nano-scale features can be clearly observed in the scanning electron microscope on the surface of the diffractive microlens. Surface roughness data tested shows that the surface roughness of fabricated diffractive microlens is in the nanometer range, which has reached the level of optical mirror. The optical aperture is in the micrometer range. The characteristics of the micro-structures on the surface and the optical aperture can be set and arranged flexibly by the iterative angular spectrum algorithm, according to the characteristics and parameters of the incident and outgoing beam. The results of optical characteristics measurement show that the diffractive microlens can focus incident red laser into a very small bright focal spot, and the phenomenon of focusing and defocusing is obvious. The analysis of beam quality shows that the intensity distribution and size of the focal-spot is in accord with pre-calculated results. The fabricated diffractive microlens indicates a very high diffraction efficiency. The experimental results demonstrate that the performances of the diffractive microlens can be further improved by modifying the design algorithm and optimizing the manufacture craft.

Analysis of Diffractive Micro-cylindrical Lenses Based on Rigorous Electromag-netic Model

Rigorous vector analysis of diffractive micro-cylindrical lenses' characteristics of focal depth and focal shift

Analysis of Diffractive Microlenses Focal Performance Based on Rigorous Electromagnetic Theory

Axial Focusing Characteristics Of Diffractive Micro-Lenses Based On A Rigorous Electromagnetic Theory

Electromagnetic Analysis Of Diffractive Lens With C Method And Local Linear Grating Model

Characteristic Analysis of Multi-Layer Diffractive Elements

Rigorous Concept For The Analysis Of Diffractive Lenses With Different Axial Resolution And High Lateral Resolution

Rigorous Vector Analysis of Finite Aperture Subwavelength Diffractive Optical Elements

Analysis of the Focal Characteristics of Cylindrical Lenses Made of Anisotropically Dielectric Material Based on Rigorous Electromagnetic Theory

Wavefront Analysis Method of Pinhole Point-Diffraction Based on Waveguide Theory

Iterative optimization algorithm based on electromagnetic model for designing diffractive micro-optical elements

Design and Fabrication of Diffractive Microlens and Analysis of Optical Characteristics

Beam Focusing Characteristics of Diffractive Lenses with Binary Subwavelength Structures

Design of Diffractive Microlenses Using General Focal Length Function

Rigorous electromagnetic design of finite-aperture diffractive optical elements by use of an iterative optimization algorithm.

Modeling and analysis for imaging characteristics of infrared array-aperture diffractive optical system

Designing Diffractive Optical Elements for Special Functions Using a Rigorous Method

Design of Diffractive Phase Element for Modulating the Electric Field at the Out-Of-Focus Plane in A Lens System

Simulation Method for Analyzing Mechanical Long-Period Fiber Gratings under High Birefringence

Analysis of a closed-boundary axilens with long focal depth and high transverse resolution based on rigorous electromagnetic theory.

Applications of Improved First Rayleigh-Sommerfeld Method to Analyze the Performance of Cylindrical Microlenses with Different F-Numbers.