SOI Thermo-Optic Modulator with Fast Response

王小龙,刘敬伟,严清峰,陈绍武,余金中
IF: 2.56
2003-01-01
Chinese Optics Letters
Abstract:Silicon-on-insulator (SOI) technology offers tremendous potential for integration of optoelectronic functionson a silicon wafer. In this letter, a 1 × 1 multimode interference (MMI) Mach-Zender interferometer(MZI) thermo-optic modulator fabricated by wet-etching method is demonstrated. The modulator has anextinction ratio of -11.0 dB, extra loss of -4.9 dB and power consumption of 420 mW. The response timeis less than 30μs.
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