Experimental Study of the Influence of CH and H on the Conformation, Chemical Composition, and Luminescence of Silicon Quantum Dots Inlaid in Silicon Carbide Thin Films Grown by Remote Plasma-Enhanced Chemical Vapor Deposition.
Rodrigo León-Guillén,Ana Luz Muñoz-Rosas,Jesús A. Arenas-Alatorre,Juan Carlos Alonso-Huitrón,Ana Laura Pérez-Martínez,Arturo Rodríguez-Gómez,Rodrigo León-Guillén,Ana Luz Muñoz-Rosas,Jesús A. Arenas-Alatorre,Juan Carlos Alonso-Huitrón,Ana Laura Pérez-Martínez,Arturo Rodríguez-Gómez
DOI: https://doi.org/10.1021/acsomega.2c01384
IF: 4.1
2022-06-22
ACS Omega
Abstract:Silicon carbide (SiC) has become an extraordinary photonic material. Achieving reproducible self-formation of silicon quantum dots (SiQDs) within SiC matrices could be beneficial for producing electroluminescent devices operating at high power, high temperatures, or high voltages. In this work, we use a remote plasma-enhanced chemical vapor deposition system to grow SiC thin films. We identified that a particular combination of 20 sccm of CH and a range of 58-100 sccm of H mass flow with 600 °C annealing allows the abundant and reproducible self-formation of SiQDs within the SiC films. These SiQDs dramatically increase the photoluminescence-integrated intensity of our SiC films. The photoluminescence of our SiQDs shows a normal distribution with positive skewness and well-defined intensity maxima in blue regions of the electromagnetic spectrum (439-465 nm) and is clearly perceptible to the naked eye.
chemistry, multidisciplinary