Structural, electro-optical and nonlinear optical properties of sputtered titanium–gallium co-doped zinc oxide transparent semiconductor films
J. H. Gu,Y. Tian,S. B. Chen,Z. Y. Zhong
DOI: https://doi.org/10.1007/s10854-023-10632-2
2023-06-04
Abstract:The titanium and gallium co-doped zinc oxide (ZnO:Ti–Ga) transparent semiconductor films (TSFs) were synthesized via magnetron sputtering process. The dependence of electro-optical, structural, morphological and nonlinear optical (NLO) characteristics on sputtering power ( P s ) was investigated by various characterize methods. The results demonstrate that all the TSFs present a wurtzite hexagonal crystal structure and [002]-preferred orientation. The P s has a significant impact on the film properties of the ZnO:Ti–Ga TSFs. The sample fabricated at 180 W possesses the optimal electro-optical performance and crystalline quality, with the maximum figure of merit, highest mean visible transmittance, minimum resistivity, lowest dislocation density and lattice strain and of 1.13 × 10 4 Ω −1 ·cm −1 , 86.9%, 6.25 × 10 –4 Ω·cm, 1.49 × 10 10 lines/cm 2 and 6.98 × 10 –4 , respectively. Moreover, the optical constants of the ZnO:Ti–Ga TSFs were extracted by the optical spectrum fitting method. The dispersion behavior of refractive index was assessed. The optical energy gaps, oscillator parameters and NLO constants were obtained. The results demonstrate that the NLO constants are dependent upon the P s and rise monotonically with increasing the photon energy for all the ZnO:Ti–Ga TSFs.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied