Development and Application for Auto-Analyzer of Plasma Ion Energy

吴先球,陈俊芳,蒋珍美,熊予莹,吴开华,任兆杏
DOI: https://doi.org/10.3321/j.issn:0372-2112.2003.02.007
2003-01-01
Tien Tzu Hsueh Pao/Acta Electronica Sinica
Abstract:An ion energy auto-analyzer was designed and implemented for the rapid measurement of plasma ion energy distribution. The analyzer was composed of a multi-plate probe and a computer-controlled measurement system. The experiment and data-process were automatically accomplished with software design with Labview5.0. The measured result showed that ion energy was distributed in 12-42 eV in an ECR plasma reaction chamber. There is no high-energy ion in ECR plasma. It is advantageous for process of semiconductor device with some specific requirement in ECR plasma process techniques.
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