Laser Divergence Angle Measurement Using Single Wedge Plate Shearing Interferometry

Hl Liu,Dg Sha,Mx Liu,Lf Chen

2003-01-01

Abstract:In this paper, single wedge-plate shearing interferometry is put forward to measure laser divergence angles. Measurement principle is analysised and measurement uncertainty analysis is made. The frame of this method is simple, and researches proves that this method is feasible and with high precision.

What problem does this paper attempt to address?

A Novel Method To Enhance The Sensitivity For Two-Degrees-Of-Freedom Straightness Measurement

Cuifang Kuang,En Hong,Qibo Feng,Bin Zhang,Zhifeng Zhang

DOI: https://doi.org/10.1088/0957-0233/18/12/014

IF: 2.398

2007-01-01

Measurement Science and Technology

Abstract:A low cost and high precision system which can measure two-degrees-of-freedom straightness simultaneously is proposed based on a laser collimator. In the system, a miniature fiber coupled diode laser generates a collimating beam. The sensitivity of the straightness error measurement is magnified by a factor of 4 compared with the lateral movement of the retro-reflector itself after the multi-reflections. A Renishaw ML10 laser interference measurement system was used to verify the developed system in a series of experiments in the laboratory environment. Experimental results agree with the expected results. The two-dimensional straightness error measurement had linear correlativity close to 1 and the standard one-to-one deviation error was better than 0.32 mu m obtained over a travel range of 600 mu m.
High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

Cuifang Kuang,En Hong,Qibo Feng

DOI: https://doi.org/10.1117/1.2740137

IF: 1.3

2007-01-01

Optical Engineering

Abstract:A single method for simultaneously measuring 2-D rotational angles is proposed by using a collimation laser. Compared with the traditional autocollimator measurement method, the proposed method can also be applied to longer distance and higher precision angular measurement. The 2-D angular drift of the reference datum beam is suppressed by a factor of 10 via expansion. A traditional single lens in front of the detector is replaced by combination lenses to increase the sensitivity and compactibility. The measurement principle of the 2-D angles is also analyzed. The feasibility and stability of the presented system are verified by comparison with the Renishaw ML10 laser interference measuring system. The experimental results show that the linear correlativity is 0.99999 and the point-to-point standard deviation error is less than +/- 0.2 arcsec in a +/- 60-arcsec range and 2000-mm distance. This proposal is most advantageous for simultaneous long distance and high accuracy of 2-D angular errors measurement of a linear guide manner. (C) 2007 Society of Photo-Optical Instrumentation Engineers.
High-precision laser alignment technique based on spiral phase plate

Ding Luo,Cuifang Kuang,Xiang Hao,Xü Liu

DOI: https://doi.org/10.1016/j.optlaseng.2012.02.010

IF: 5.666

2012-01-01

Optics and Lasers in Engineering

Abstract:The laser alignment technique is widely used in the measurement of straightness due to its unique capabilities of non-contact detection, fast response and high accuracy. By coupling the laser beam into a single-mode fiber, traditional alignment method can be greatly improved, since the emitting beam from the fiber basically won’t be affected by the variation of the incident intensity distribution. However, such method still suffers from errors caused by the vibration of the emitting fiber end and air turbulence. In this paper, the traditional alignment reference, which is the centroid of the intensity distribution, is replaced by center of the dark spot in a diffraction pattern, by adding a spiral phase plate (SPP) into the optical path. The center of the dark spot is proved to be stationary when the laser beam drifts. The far-field diffraction model of SPP is theoretically analyzed in detail. In the calibration experiments, the detected position data of the scanned CCD is highly linear with a correlation coefficient of 0.99999. The system is guaranteed with outstanding stability by a series of experiments, in which the standard deviation of the x and y coordinates are respectively only 7.0% and 33.7% in short-term tests and 20.3% and 25.3% in long-term tests. With simple configuration, the proposed system demonstrates satisfying performance in laser alignment.
A Novel Method to Simultaneously Measure the Straightness

Cuifang Kuang,Qibo Feng,Bin Liu

2004-01-01

Abstract:A precise two-degree-of-freedom measuring system (2DMS) is developed based on single-mode optical fiber, LD, cube corner retroreflector and four-quadrant photodetector (4-Q), and the simultaneous on-line measurement of lateral and vertical direction straightness errors of the linear stage is carried out. The moving part is wireless, which eliminates any errors introduced by pushing and pulling the wires. The sensitivity of the straightness error measurement can be improved by a factor of 2 with the cube corner retroreflector. This fiber-based optically aligned beam is used to establish a reference line for the straightness measurement of any mechanical system. 4-Q detector is used to receive the laser beam. A chip microcomputer is developed to conduct all data acquisition and signal processing. The beam drift influence can be removed in the greatest extent from the system. The experiments on the measurement system stability, repeatability and its comparison with the HP5528 double-frequency laser interferometer are carried out.
Measuring Straightness Method with Common Path Compensation for Laser Drift

KUANG Cui-fang,FENG Qi-bo,LIU Bin,ZHANG Bin

DOI: https://doi.org/10.3969/j.issn.1003-501x.2005.04.009

2005-01-01

Abstract:Atmosphere turbulence is the major factor that affects the accuracy of the propagating direction of a laser beam, and causes serious errors in laser straightness measurement at long distance. A simple method of suppression of laser drift caused by air turbulence is put forward in the paper. With corner retro-reflector as position detector, the linearity error caused by reflection light of the corner retro-reflector is detected by a quadrant detector. 2-D position-sensitive detector and a lens are used to monitor angular drift caused by air turbulence. Experimental results show that the additional position error induced by air turbulence can be reduced by about 75%. Two-dimensional errors caused by air turbulence can be compensated simultaneously through common path.
Single-shot reflective shearing point diffraction interferometer for wavefront measurements.

wei zhu,liquan chen,chao gu,jianmin wan,dewen zheng

DOI: https://doi.org/10.1364/AO.54.006155

IF: 1.9

2015-01-01

Applied Optics

Abstract:A single-shot reflective shearing point diffraction interferometer (S-SRSPDI) is designed for large-aperture dynamic wavefront measurements. The PDI is integrated on the small substrate with properly designed thin film. The wavefront under test is reflected by the front and rear surfaces of the substrate respectively to generate an interferogram with high linear-carrier frequency, which is used to reconstruct the wavefront by means of the Fourier transform algorithm. In this paper, the analytic formula of intensity distribution of the interferogram is derived. The parameters related with the carrier frequency of fringes are discussed. The method to optimize the contrast of the interferogram is proposed by analyzing the reflective polarization effects. In addition, the spurious fringes of the interferogram are removed by the proper designed blocking film. S-SRSPDI was applied to detect the dynamic wavefront with a diameter of 400 mm. The measured aberrations are in good agreement with those obtained by the shearing method, which verifies that the proposed S-SRSPDI is a powerful tool for large-aperture dynamic wavefront measurements. (C) 2015 Optical Society of America
Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

Xianfan Wang,Jingjing Su,Jianhua Yang,Lijun Miao,Tengchao Huang

DOI: https://doi.org/10.1364/ao.425294

IF: 1.9

2021-01-01

Applied Optics

Abstract:Many researchers from scientific and industrial fields have devoted their efforts to the laser interferometer, aiming to improve the measurement accuracy and extend the practical applications. Here, we present a modified homodyne laser interferometer based on phase modulation for simultaneously measuring displacement and angle. The active sawtooth wave phase modulation enhances immunity of this interferometer to the environmental fluctuations and laser power drift. Based on polarized optic theory and the sinusoidal measurement retro-reflector, a modified Michelson-type interferometer configuration is designed to simultaneously measure displacement and angle. Phase difference between the reference and measurement interference signals can be obtained using the sawtooth wave phase modulation and zero crossing detection technique, where the real-time displacement and angle values can be derived directly. Experimental results demonstrate our proposed interferometer has good static and dynamic performance.
Multi-Directional Lateral Shearing Interferometer Based on Rotatable Prism Pairs

Yongjian Zhu,Jingxin Na,Yanan Zhi,Yu Wang,Yufeng Fan

DOI: https://doi.org/10.1016/j.ijleo.2014.08.008

IF: 3.1

2014-01-01

Optik

Abstract:The common camera lens usually includes the spherical glass/plastic lens and aspheric glass/plastic lens. However, spherical/aspheric shape measurement is still a key problem in the process of optical lens fabrication. At present, the in-process measurement of spherical/aspheric shape is conducted mainly by the probe-contacting method. But after a long time, its probe could be scratched severely and cause some big errors. Laser shearing interferometry is a good substitute to some degree. Nevertheless, it is not convenient for general shearing interferometer to carry out the in-process measurement because it is only suitable for certain kind of spherical/aspheric with respect to aperture or asperity. Here a new lateral shearing interferometer is proposed to solve the described problems. It is based on two Jamin plates and rotatable prism pairs which are used not only for shearing displacement and direction, but also for fringe period and tilt degree, in order to meet requirements of various spherical/aspheric shapes or asperities. The new interferometer features a simple optical structure and two symmetric light paths, which makes its system with minimal error. The relation between shearing displacement, fringe period and prism angle of rotation is given in this paper. And the error source is primarily from the manufacture errors of prisms and plates. The final experiments show that one can achieve good-quality fringe patterns according to the requirement of measurement, concerning the shearing direction, shearing displacement, fringe period, tilt degree, etc.
Laser Heterodyne Interferometer for the Simultaneous Measurement of Displacement and Angle Using a Single Reference Retroreflector

Shijie Zhao,Haoyun Wei,Yan Li

DOI: https://doi.org/10.1117/1.oe.54.8.084112

IF: 1.3

2015-01-01

Optical Engineering

Abstract:Abstract. This paper describes the design and realization of a new type of heterodyne interferometer for simultaneously measuring displacement and angle using only one reference retroreflector. Theoretically, this interferometer has better angle accuracy compared with classical systems that employ two reference retroreflectors because it can avoid the relative displacement resulting from external factors. The optical and mechanical configurations of the proposed interferometer, which consists of a frequency-stabilized dual-frequency laser, a monolithic prism, and additional optical and electronic components, are designed and finely processed. The experimental results show that the angle accuracy of the interferometer is greater than ±0.15 arcsec in comparison with an autocollimator.
Dual-frequency Laser Displacement and Angle Interferometer

Shijie Zhao,Haoyun Wei,Yan Li

DOI: https://doi.org/10.1117/12.2071869

2014-01-01

Abstract:Traditional laser angular interferometers based on a Michelson Interferometer or its modifications have the same principle: changing the angle displacement to an optical path difference. However, measuring the angular error of stage travels is a dynamic process. The main trouble is lack of displacement information and need to be solved urgently. A obvious method is using two dual-frequency interferometers to get the displacement and angular. In this paper, a new kind of displacement and angle interferometer (DIAI) is introduced. In this DIAI, displacement and angular are measured simultaneously by special optical path. The DIAI consists of a stabilized orthogonal polarization dualfrequency laser, a monolithic prism and additional optical and electronic components. The dual-frequency laser is divided into reference light and measurement light by a beam-splitting prism. The measurement light spatially separated into horizontal polarized light and vertical polarized light by the polarization splitting prism. Changing by a fixed 45°tilted reflector, the vertical polarized light is parallel to the horizontal polarized light. These parallel lights reflected by two corner cube retroreflectors at a moving target. Compared with the reference light, the displacement and angular are measured. Different from the traditional method, there is only one reference corner cube retroreflector in this system. Thus, the angular measurement accuracy is better. The accuracy of the DIAI is better than ±0.25 arcsec in comparison with an autocollimator.
Dynamic Measurement of Beam Divergence Angle of Different Fields of View of Scanning Lidar

Qing-Yan Li,Shi-Yu Yan,Bin Zhang,Chun-Hui Wang

DOI: https://doi.org/10.1088/1674-1056/abc155

2021-01-01

Chinese Physics B

Abstract:The laser beam divergence angle is one of the important parameters to evaluate the quality of the laser beam. It can not only accurately indicate the nature of the beam divergence when the laser beam is transmitted over a long distance,but also objectively evaluate the performance of the laser system. At present, lidar has received a lot of attention as a core component of environment awareness technology. Micro-electromechanical system（MEMS） micromirror has become the first choice for three-dimensional imaging lidar because of its small size and fast scanning speed. However, due to the small size of the MEMS micromirror, the lidar scanning system has a small field of view（FOV）. In order to achieve a wide range of scanning imaging, collimating optical system and wide-angle optical system are generally added to the system. However, due to the inherent properties of the optical lens, it is impossible to perfect the imaging, so the effects of collimating and expanding the beam will be different at different angles. This article aims to propose a measurement system that dynamically measures the divergence angles of MEMS scanning lidar beams in different fields of view to objectively evaluate the performances of scanning lidar systems.
Three-degrees-of-freedom Laser Interferometer Based on Differential Wavefront Sensing with Wide Angular Measurement Range.

Fuzhong Yang,Ming Zhang,Weinan Ye,Leijie Wang

DOI: https://doi.org/10.1364/ao.58.000723

IF: 1.9

2019-01-01

Applied Optics

Abstract:We present a three-degrees-of-freedom laser interferometer based on differential wavefront sensing with a wide angular measurement range. To obtain measurement signals with a high AC/DC ratio and improve the linearity of differential wavefront sensing in a wide range angular displacement measurement, a fiber bundle instead of a quadrant photodiode is applied to receive the interference light. Meanwhile, a decoupled algorithm with quadratic correction derived by the ray tracing method and kinematic analysis is detailed in the case of the wide range angular displacement. The simulation and experimental results prove that the laser interferometer with the proposed structure could realize hundreds of microradian range of angular displacement measurement, which are expanded in the differential wavefront sensing.
Measurement of Straightness Without Abbe Error Using an Enhanced Differential Plane Mirror Interferometer

Tao Jin,Hudong Ji,Wenmei Hou,Yanfen Le,Lu Shen

DOI: https://doi.org/10.1364/ao.56.000607

IF: 1.9

2017-01-01

Applied Optics

Abstract:This paper presents an enhanced differential plane mirror interferometer with high resolution for measuring straightness. Two sets of space symmetrical beams are used to travel through the measurement and reference arms of the straightness interferometer, which contains three specific optical devices: a Koster prism, a wedge prism assembly, and a wedge mirror assembly. Changes in the optical path in the interferometer arms caused by straightness are differential and converted into phase shift through a particular interferometer system. The interferometric beams have a completely common path and space symmetrical measurement structure. The crosstalk of the Abbe error caused by pitch, yaw, and roll angle is avoided. The dead path error is minimized, which greatly enhances the stability and accuracy of the measurement. A measurement resolution of 17.5 nm is achieved. The experimental results fit well with the theoretical analysis.
Laser angle measurement system with single cylinder reflection grating

Z. Xiao,H. Ai,X. Han

Abstract:The pitch of the cylinder reflection grating is used as the measurement reference in this system and the semiconductor infrared laser is used as the light source. Diffraction beams' interference principle and optic Doppler effect are used to accomplish the angle measurement. The interference pattern's phase has been spatially shifted by the polarized laser phase-shift method to enhance the measurement stability and repeatability. This system can be used for accurate angular displacement measurement.

Engineering,Materials Science,Physics
High-precision laser beam lateral displacement measurement based on differential wavefront sensing

Qi Xia,Yu-Rong Liang,Hao Yan,Zhi-Lin Xu,Li Liu,Ze-Bing Zhou

DOI: https://doi.org/10.1364/OL.497299

2023-10-15

Abstract:Accurately lateral displacement measurement is essential for a vast of non-contact sensing technologies. Here, we introduce a high-precision lateral displacement measurement method based on differential wavefront sensing (DWS). Compared to the conventional differential power sensing (DPS) method, the DWS method based on phase readout has the potential to achieve a higher resolution. The beam lateral displacement can be obtained by the curvature distribution of the wavefront on the surface of the detector. According to the theoretical model of the DWS method, the sensitivity of the lateral displacement can be greatly improved by increasing the wavefront curvature of the measured laser beam by means of lenses. An optical system for measuring the lateral displacement of the laser beam is built and calibrated by a high-precision hexapod. The experimental results show that the DWS-based lateral displacement measurement achieves a resolution of 40 pm/Hz1/2 (at 1-10 Hz) with a linear range of about 40 µm, which is consistent with the theoretical model. This technique can be applied to high-precision multi-degree-of-freedom interferometers.
Analyse of a digital angle measurement system based on laser interferometer

Wangpeng Gui

Abstract:A precise angle measurement system that based on laser interference technology was presented by expatiating and analyzing the component, principle, error and precision of the system The system takes advantage of laser as its light source, Malchlson Interferometer as its main angle measurement equipment An exact angle measurement system towards big angle was realized by changing the angle displacement to line displacement that can reflect the change of optical path difference through mechanical equipment and special circuits The quantitative analyses by the method of computer simulation of the system was presented also

Engineering,Physics
Application of an Image Fusion Algorithm in Measuring the Laser Beam Far-Field Divergence Angle

Xuyang Zhou,Jinsong Wang,Xu Liang,Yunfeng Xiao,Jia Liu

DOI: https://doi.org/10.1364/jot.85.000148

IF: 0.4

2018-01-01

Journal of Optical Technology

Abstract:The measurement of laser beam far-field parameters plays an important role in the accurate assessment of the laser's transmission effect and the laser system's overall performance. A simpler and more convenient detection method for an image fusion algorithm of saturated and unsaturated double frames is proposed, based on the technology of image fusion, to measure the laser beam far-field angle. After being attenuated by the attenuating plate, the pulsed laser is focused by the objective lens to form a spot image on the charge-coupled device image plane. The spot size that has been attenuated by the attenuator can be calculated and analyzed by the mathematical modeling software MATLAB, and then the far-field divergence angle value is calculated. The experimental device and the working principle are introduced in detail, theoretical analysis of the computer data processing method is given, and the data processing results are shown in the end. Experimental results indicate that the amount of computation compared with the previous image fusion algorithm is smaller, this method can be used to measure the laser beam far-field divergence angle, the calculation speed is fast, and the measurement accuracy can be up to 2%. (C) 2018 Optical Society of America
Quadrature Phase Detection Based on a Laser Self-Mixing Interferometer with a Wedge for Displacement Measurement

Dongyu Li,Qinghua Li,Xiao Jin,Bing Xu,Deng Wang,Xuping Liu,Tingting Zhang,Zhenghe Zhang,Minglang Huang,Xiaohui Hu,Chengwei Li,Zhen Huang

DOI: https://doi.org/10.1016/j.measurement.2022.111888

2022-01-01

SSRN Electronic Journal

Abstract:We report a novel and simple method to generate a pair of self-mixing signals with quadrature phase difference in He-Ne laser by introducing a wedge into the external cavity. A wedge phase-shift laser self-mixing effect theory is developed to explain the phase-shift phenomenon, and the relationship between the phase difference and the distance from the center of the iris diaphragm to the center of the spot is given. Then a simple and effective wedge-quadrature laser self-mixing interferometer is established for displacement measurement by the quadrature phase detection method. Experimental results show that the max error is 182 nm for a target displacement of 20 mu m. This structure provides a useful exploration for phase-shift signal generation and simplifies the self-mixing signal demodulation process with only a single four-quadrant inverse tangent operation, which has potential application in real-time displacement measurement.
Displacement Measurement with Λ/8 Resolution Based on the Bifurcate Subcavity Modulation Effect in a Dual Frequency Laser

Weixin Liu,Shulian Zhang

DOI: https://doi.org/10.1117/12.807157

2008-01-01

Abstract:A novel method for displacement measuring is proposed based on the bifurcate subcavity modulation effect in a dual frequency laser. Owing to the intracavity wave plate, the laser operates on two orthogonally polarized modes. If a portion of laser, channeled into a subcavity by the wave plated, is reinjected back to the resonator, the mode intensities are modulated with a period of a half of wavelength, respectively. And the two modulations behave a 90 degree phase difference, which could subdivide a period into four regions: horizontal polarization, two polarizations, vertical polarization, and no light. In this paper, this subcavity modulation effect is demonstrated experimentally and theoretically. Furthermore, a displacement measurement of the subcavity mirror is developed with resolution up to λ/8, viz. about 79nm at laser wavelength of 632.8nm. The direction discrimination of measuring could also be realized utilizing the sequence of four different subdivision zones. The measuring range, mainly limited by both the splitting frequency difference and the bifurcate subcavity length, could reach tens of millimeters. Measurement results are presented and the corresponding error analyses are discussed. This system has great potential in applying to metrological fields for its simplicity, compactness and high quality performance.
Second Harmonic Measurement of Multi-Beam Laser Heterodyne with Ultra-Precision for the Small Angle

Y. Chao Li,Q. Ding,Y. Qiao Wang,J. Ru Yang,C. Yu Liu,C. Hui Wang,J. Feng Sun

DOI: https://doi.org/10.3788/col201412.s10401

IF: 2.56

2014-01-01

Chinese Optics Letters

Abstract:This paper proposes a novel method of multibeam laser heterodyne measurement for an electrostriction coefficient. Based on the Doppler effect and heterodyne technology, loaded with the information of length variation to the frequency difference of the multibeam laser heterodyne signal by the frequency modulation of the oscillating mirror, this method can obtain many values of length variation caused by different voltages after the multibeam laser heterodyne signal demodulation simultaneously. Processing these values by a weighted-average method, it can obtain length variation accurately, and eventually obtain value of electrostriction coefficient of metal by the calculation. This novel method is used to simulate measurement for electrostriction coefficient of PZT under different voltages by MATLAB, and the obtained result shows that the relative measurement error of this method is just 0.98%.

Laser Divergence Angle Measurement Using Single Wedge Plate Shearing Interferometry

A Novel Method To Enhance The Sensitivity For Two-Degrees-Of-Freedom Straightness Measurement

High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

High-precision laser alignment technique based on spiral phase plate

A Novel Method to Simultaneously Measure the Straightness

Measuring Straightness Method with Common Path Compensation for Laser Drift

Single-shot reflective shearing point diffraction interferometer for wavefront measurements.

Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

Multi-Directional Lateral Shearing Interferometer Based on Rotatable Prism Pairs

Laser Heterodyne Interferometer for the Simultaneous Measurement of Displacement and Angle Using a Single Reference Retroreflector

Dual-frequency Laser Displacement and Angle Interferometer

Dynamic Measurement of Beam Divergence Angle of Different Fields of View of Scanning Lidar

Three-degrees-of-freedom Laser Interferometer Based on Differential Wavefront Sensing with Wide Angular Measurement Range.

Measurement of Straightness Without Abbe Error Using an Enhanced Differential Plane Mirror Interferometer

Laser angle measurement system with single cylinder reflection grating

High-precision laser beam lateral displacement measurement based on differential wavefront sensing

Analyse of a digital angle measurement system based on laser interferometer

Application of an Image Fusion Algorithm in Measuring the Laser Beam Far-Field Divergence Angle

Quadrature Phase Detection Based on a Laser Self-Mixing Interferometer with a Wedge for Displacement Measurement

Displacement Measurement with Λ/8 Resolution Based on the Bifurcate Subcavity Modulation Effect in a Dual Frequency Laser

Second Harmonic Measurement of Multi-Beam Laser Heterodyne with Ultra-Precision for the Small Angle