A Fast Spectral Measurement And Analysis System Of The Plasma Radial Temperature

Yh Gan,Yq Gao,Xm Qi,H Xing,Y Jin
2003-01-01
Abstract:This paper develops a fast system which can automatically collect and process the plasma spectrum Of each point and also can largely acquire, characteristics of the spatial distribution of the plasma spectrum. The range of a frame of spectrum information of any point can extend 120nm. The spatial resolution is 0.2nm and the velocity reaches dimension of ms. This paper presents the characteristics of the spatial distribution of Arc plasma when given any cases of currents and airflows and also provides the spatial distributions of some important parameters such as temperature and density of electron, etc.
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