Effect of Pulsed Bias on Chemical Structure of DLC Films Prepared by Plasma Processing

孙明仁,夏立芳,孙跃,马欣新,孙立海
DOI: https://doi.org/10.3969/j.issn.1005-0299.2002.01.013
IF: 1.8
2002-01-01
Materials Science and Technology
Abstract:An attempt has been made to prepare DLC(diamond like carbon)films by PBPBD(plasma based pulsed bias deposition)technique with C 2 H 2 and different negative pulsed bias.The chemical structure of the DLC films were characterized by X-ray photoelectron spectroscopy(XPS),Raman spectroscopy and elec-trical resistance.The results show that the SP 3 fraction monotonically increased with the decrease in the peak value of the negative pulsed bias.However,the bombardment of the energetic ions was the essential condition for the formation of DLC film in chemical structure due to the polymer-like film formed when the pulsed bias equals zero.It appears that no monotonic relationship for the effect of pulsed bias on the size of SP 2 cluster and bond-angle disorder.It was found that the bond-angle disorder was higher and the SP 2 clusters were fine under the medium peak value of the negative pulsed bias condition.
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