High efficiency, high speed InP/InGaAs resonant-cavity photodetector operating at long wavelength

Hui Huang,Qi Wang,Lei Lei,Yongqing Huang,Xiaomin Ren
2002-01-01
Abstract:An InP/InGaAs resonant cavity enhanced (RCE) photodetector which is promising of high speed, high efficiency is reported. The rear illuminated was adopted to circumvent the problem of the low reflectivity of InP/InGaAsP distribute Bragg reflector (DBR) grown on InP substrate, and quantum efficiency of 80% at 1.583 μm has been achieved with an absorption layer only 0.2 μm. To achieve high-speed operation the capacity of photodetector was reduce without decrease of the quantum efficiency via proton implantation.
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