Structure and Tribological Properties of TiN Coatings Deposited with Two Different PVD Methods

韩修训,阎鹏勋,阎逢元,刘维民,余画洋,徐建伟,吴志国
DOI: https://doi.org/10.3321/j.issn:1004-0595.2002.03.004
2002-01-01
Abstract:Titanium nitride coatings were deposited on unheated stainless-steel substrate and stainless-steel substrate heated to 400^DDGC by filtered cathodic arc plasma deposition (FCAP) and direct current magnetron sputtering deposition (DCSP), respectively. The structure, morphology, bonding strength and tribological behavior of the coatings were comparatively investigated. Thus a nanoindenter was used to measure the hardness of the coatings. The structure and the surface morphology of the coatings were analyzed with X-ray diffraction, X-ray photoelectron spectrometry and scanning electron microscopy, and the friction and wear behavior of the coatings was examined with a DF-PM one-way reciprocating friction and wear test rig in a ball-on-plate contact configuration. The results show that the TiN coating deposited by FCAP is dense and smooth than that deposited by DCSP, and it has much higher hardness and bonding strength to the substrate as well. This accounts for the better friction-reducing and antiwear ability of the coating produced with the FCAP method. The substrate material used in the test is 1Cr18Ni9Ti.
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