Abstract:The grating interferometer measurement is the commonly used detection method for precision displacement detection system,and it features higher detecting resolution;in order to further improve the detecting resolution,through analyzing the interference fringe signal of grating,a new method based on diffraction grating for ultra precision displacement detection and positioning is proposed.By adopting diffraction grating as the measuring component,through adding phase movement of photoelectric sensor into the diffraction grating displacement interferometer system,the receiving phase of the diffraction grating system is changed.With this method,the interferometer system is adjusted to only have two fringes,in the final positioning stage of the target positioning motion bench;the photoelectric sensor in the receiving system is moving between two of the interference fringes,so the receiving phase of the grating interferometer is changed.This method breaks through the physical limitations of the detecting component;theoretically,the detection resolution above sub-nanometer can be obtained.In accordance with the principle of phase moving,the grating interferometer ultra-precision displacement detection positioning system with phase shift function is set up.The effectiveness of this method is proved through positioning detection tests.

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<title>Integration nanometer indicating system for reducing temperature drift of interferometer</title>

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