Surface Plasma Wave Sub-nanometer Indicating System

J Wu,CY Yin,JH Guo
DOI: https://doi.org/10.1117/12.403919
2001-01-01
Chinese Journal of Lasers
Abstract:A new method for nanometer positioning based on surface plasma wave is reported. A fibre probe approaching a coated prism can be equivalent to a four-layer prism-metal-air-fibre system. Analysis of the near-field beam intensity entering the fibre probe is presented. Theoretical analysis shows that the intensity coupling into the fibre probe changes according to the thickness of air gap. Non-contact nanometer indicating system can be set up according to this characteristic. Experiments show that standard deviation of 2nm and resolution of 0.1nm/nV of positioning repeatability can be achieved under air conditioning of +/-1 degreesC/h.
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