Abstract:This paper presents an efficient design approach for microelectromechanical systems (MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator Multi-User MEMS Processes (SOIMUMPs). A design for a decoupled mass MEMS resonant gyroscope with tuning electrodes is presented to minimize cross-axis coupling and optimize the gyroscope's performance. The device features a size of 1.8 ×2.772 mm^2. A decoupled mass MEMS gyroscope has been designed using a novel mechanical beam configuration that optimizes the structural design to reduce unwanted interactions between drive and sense axes motions. Mode order has been achieved by obtaining the first two modes as drive and sense modes at 9946.3 Hz and 10202.7 Hz, respectively. Parallel plate electrostatic tuning electrodes have been added to adjust and match the drive and sense modes at the resonant frequencies of 9946 Hz. This mode matching is crucial for optimizing gyroscope performance, accuracy, and sensitivity. The effects of temperature variation on the performance of the designed decoupled mass MEMS gyroscope have been investigated, particularly in terms of its mode-matched operation achieved using tuning electrodes. Finite Element Method (FEM) simulations were conducted, demonstrating that thermal stability was achieved, and mode-matched operation was maintained within the temperature range of -40 oC to 80 oC. The gyroscope exhibits enhanced performance compared to existing MEMS gyroscopes under mode-matched conditions, featuring a lower temperature coefficient of frequency (TCF) at 0.0415 Hz/oC in the drive mode and 0.0165 Hz/oC in the sense mode. FEM analysis for the fabrication process tolerances has been done, where MEMS gyroscope's resonant frequencies, output capacitance, output displacement, and sense mode quality factor have shown negligible changes to fabrication process tolerances. Transient analysis was conducted using CoventorWare MEMS+ 3D schematic, which was integrated with MATLAB Simulink to measure the MEMS gyroscope's output response, which corresponded with the varying input angular velocity signal.

TIMUM DESIGN AND ELECTRICAL SIMULATION OF COMB-GIMBALMICROMACHINED GYROSCOPE

FEM SIMULATION OF COMB-GIMBAL MICROMACHINED GYROSCOPE

A MICROMECHANICAL MODE-MATCHED GYROSCOPE USING STIFFNESS NONLINEARITY AND ELECTROSTATIC TUNING

Simulation of characteristic of comb-gimbal micromachined gyroscope

Modeling and Simulation of Micromachined Gyroscope

Design and simulation of a novel micromachined comb-gimbal gyroscope

Structure Design and Structural Parameter Optimization of Fully Symmetric Vibratory Gyroscope

High Performance Interface Circuit for MEMS Gyroscope

Design and Simulation of Novel MEMS Resonant Gyroscope

Mixed Simulation of Micromachined Gyroscope's Sensor Model and Interfacing Circuits

Digital Detection and Optimization Design for Resonant Fiber Optic Gyroscope

A Novel Microelectromechanical Resonant Gyroscope

Design And Simulation Of A Completely Decoupled Micromechanical Gyroscope

Micro-Opto-Electro-Mechanical Gyroscope Based On The Talbot Effect Of A Single-Layer Near-Field Diffraction Grating

High-performance Silicon Micromachined Resonant Gyroscope

Design of a Micro-Electro Mechanical System Quad Mass Gyroscope with Compliant Mechanical Amplification

A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes

A lateral-axis micromachined tuning fork gyroscope with novel driving and sensing combs

Design and optimization of a resonant output frequency gyroscope for robust sensitivity and bandwidth performance

Design and Analysis of Mode-Matched Decoupled Mass MEMS Gyroscope with Improved Thermal Stability

Effects of Combs on Coupling Error in the Vibratory MEMS Gyroscope with Various Air Dampings