Ultra-High Density Data Storage In Sio2/Si System By Electrostatic Force Microscope

Zy Wang,Hh Zhang,Jb Bao,Wm Guo
2002-01-01
Abstract:First we focus on the realization of a technologically simplified probe storage device based on electrostatic force microscope. The tuning-fork-based electrostatic force microscope can be easily used to write charges into a Si-dielectric layer by applying a pulse voltage to the conductive tip, and also read out the trapped charges' using an adjustable alternating current voltage.. Positive charge dots are written on SiO2/Si medium with different writing bias and writing time. A typical charge array, the separation of which is about 200nm between two adjacent charges, has been obtained with charge dimension of 100 nm by applying a 30 ms pulse series of 6 V. The charge data density is up to 2.5 GB/cm(2). Finally, we investigate the trapped charges quantitatively by tracking the changes of the direct current voltage applied to the tip and find that the trapped charges would be stable with the dimension of 40 nm.
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