Fracture toughness of diamond-like carbon films

Qingrun Hou,Ju Gao
DOI: https://doi.org/10.1142/S0217984901001550
2011-01-01
Modern Physics Letters B
Abstract:Diamond-like carbon films were deposited on silicon (111) substrates at different temperatures using a pulsed-laser deposition method. Vickers indentation was used to measure the fracture toughness of the deposited diamond-like carbon films. It is found that diamond-like carbon films deposited at low temperature (55 degreesC and 100 degreesC) were very brittle and the fracture toughness was a difficult parameter to measure. The fracture toughness of diamond-like carbon films deposited at 270 degreesC increased with film thickness and the measured values were between 1.0 and 2.3 MPa m(1/2).
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