A New Method to Pattern Silicon Surface with Chemical Functional Groups

RG Wu,JH Ouyang,XS Zhao,XH Huang,HZ Huang,NZ Wu
DOI: https://doi.org/10.3866/pku.whxb20011013
2001-01-01
Acta Physico-Chimica Sinica
Abstract:Hydrogen-terminated silicon surface was found to react with I-alkenes to produce stable monolayers. To pattern such monolayers and create surfaces with regions of different chemical functionalities, we used the combination of the photolithography and the light induced alkylation. The surfaces had been characterized by XPS, AFM, and contact angel measurement. It is shown that this procedure can be used to prepare micro-patterns of chemical functional groups on silicon substrate.
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