Abstract:This article reports some new experimental evidence for the effect of carbon on oxygen precipitation in a high carbon content Czochralski silicon (H[C] Cz-Si) crystal. The oxygen precipitation occurring at an intermediate temperature of 950 °C has been especially investigated. In such case, the carbon atoms slightly participate in oxygen precipitation with 1200 °C preannealing, while the carbon atoms actively participate in oxygen precipitation with low temperature preannealing. The experiments show that the 1230 cm−1 absorption band in the Fourier transmission infrared spectrum definitely originates from the oxygen precipitates involving insignificant carbon reduction; on the other hand, the oxygen precipitates involving significant carbon reduction are surely irrelevant to the 1230 cm−1 absorption band. According to the correlation of the change in oxygen and carbon concentrations during oxygen precipitation, it is plausible that there is a critical precipitate size which distinguishes the carbon behavior in oxygen precipitation, that is, the carbon atoms actively participate in oxygen precipitation when the precipitates are smaller than the critical size; whereas, the carbon atoms are only slightly involved in oxygen precipitation when the precipitates are larger than the critical size.

Evidence for the effect of carbon on oxygen precipitation in Czochralski silicon crystal