Oriented Si nanowires grown via an SLS mechanism

Y. J. Xing,Z. H. Xi,Q. L. Hang,H. F. Yan,S. Q. Feng,J. Xu,H. Z. Zhang,D. P. Yu
DOI: https://doi.org/10.1557/PROC-581-231
2000-01-01
Abstract:Highly oriented silicon nanowires were grown on Si (111) substrate via a solid-liquid-solid (SLS) mechanism. Unlike the well known vapor-liquid-solid (VLS) mechanism of whisker growth, no gaseous or liquid Si source was supplied during growth. Ni was used as the liquid forming agent and mixture of H 2 and Ar was introduced in the experiment. Oriented silicon nanowires grew at 950°C and the ambient pressure kept at about 200 Torr. The oriented silicon nanowires have a length around I il m and uniform diameter about 25nm. Selected area electron diffraction showed that silicon nanowires are completely amorphous. The approach used here is simple and controllable, and may be useful in large-scale synthesis of various nanowires.
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