Controlled Growth of Amorphous Silicon Nanowires Via a Solid-Liquid-Solid (SLS) Mechanism

Yan H. F.,Xing Y. J.,Hang Q. L.,Yu D. P.,Xu J.,Zhang H. Z.,Xi Z. H.,Feng S. Q.
DOI: https://doi.org/10.1557/proc-581-225
1999-01-01
Abstract:Amorphous silicon nanowires (a-SiNW’s) with average diameter around 20 nm were synthesized at about 950° C under an Ar/H2 atmosphere on large area of a (11) Si substrate without supplying any gaseous or liquid Si sources. The Si substrate, deposited with a layer of Ni of about 40 nm thick, served itself as a silicon source for the growth of the a-SiNWs. Different from the well-known vapor-liquid-solid (VLS) for conventional whisker growth, it was found that growth of the a-SiNWs was controlled by a solid-liquid-solid mechanism, which is analogous to the VLS model.
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