In-Diffusion and Out-Diffusion of Oxygen in C-Axis-Oriented YBa_2Cu_3O_(6+x) Film, Studied by in Situ X-Ray Diffraction

Jin Xuejun
2000-01-01
Abstract:Both in-diffusion in O 2 and out-diffusion in N 2 of oxygen at 325℃ in c-axis-oriented YBa 2Cu 3O 6+x film,deposited on single-crystal (100) SrTiO 3 by direct current sputtering,were studied by in situ X-ray diffraction on a Rigaku D/Max-RB diffractometer.The accordance between in-diffusion in O 2 and out-diffusion in N 2 was found,and both kinetic courses were conformed with the solution of the J. S. Fisher's diffusion equation in this case.So it was concluded that in two courses,diffusion was the controlling course and neither the barrier energy for chemical adsorption nor that for desorption was larger than the activation energy for diffusion of oxygen in the film at that temperature.
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