Determination Of Trace Elemental Inpurities In High Purity Trimethylgallium By Inductively Coupled Plasma-Atomic Emission Spectrometry

Lei Yu,Baoyuan Lü,Liwen Qiu,Xiangzhen Sun,Huiqun Fang
IF: 1.193
2000-01-01
Chinese Journal of Analytical Chemistry
Abstract:A method of determining Cu, Fe, Si, Zn etc. 31 trace elemental impurities in high purity Ga (CH3)(3) by inductively coupled plasma-atomic emission spectrometry is reported. The spectral and non-spectral interference of gallium matrix, the effect of the matrix concentration to the signal-to-noise ratio and the detection limits of the determined elements were investigated. The optimum working conditions, the analytical spectral lines and matrix concentration were examined. And we also studied the decomposition of the trimethylgallium.
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