Piezoelectric-electrorheological Planar Stepper Motor

SX Dong,WJ Shen,HY Qiu,LT Li
DOI: https://doi.org/10.1080/00150199908015797
1999-01-01
Ferroelectrics
Abstract:A new type of piezoelectric-electrorheological (ER) planar stepper motor based on piezoelectric effect and electrorheological effect was proposed firstly in this paper. The prototype motor has four piezoelectric actuators for producing force and displacement and four ER clamps for clamping position on a base plate, While the ER clamps are combined with piezo-actuators in different way, the movement of the motor in x-direction or y-direction on the base plate can be obtained according to a bionic motion mode. Experimental results showed that the prototype planar motor steps nimbly both in x direction and y direction with large travel range and high resolution of less 0.1 mum Maximum stepping speed of 6mm/min and maximum load of 170gf were observed in experiments.
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