Experimental study on the error caused by phase distortion of heterodyne signal process system for nanometrology

Gaoliang Dai,Chunyong Yin,Guangping Xie

1999-01-01

Guangxue Jishu/Optical Technique

Abstract:The heterodyne interferometer is an important instrument for nanometrology. A signal processing system has been established to realize the subnanometric resolution based on frequency multiplication frequency mixing and FPGA for high frequency counting, however in doing so, the nonlinear unit such as phase lock loop (PLL) and bandpass filter (BPF) will cause dynamic phase error. An analysis was made here both theoretically and experimentally, which shows that the phase error of PLL is less than 1 nm and can be ignored while the phase error of BPF is of the order of nanometer. Therefore, a transverse Zeeman laser having beat frequency of only 320 kHz was introduced in the system, the electronic signal of which can be multiplied to 25 MHz and counted by using FPGA technique directly without the need of using frequency mixing unit. In this way, the phase error of BPF can be avoided.