Research on three-dimensional profiler for super-smooth surface

Yuanqing Wang
1999-01-01
Abstract:By using laser interference and electrical common-mode rejection together with the two-dimension scanning and computer, the profile of a super-smooth surface can be detected three dimensional and non-destructively with vertical resolution better than 0.1 nano-meter and lateral resolution better than 2 μm. The principle, structure and error analysis about the profiler were given. The definition of the three dimensional profile was discussed too.
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