Study on the Properties of Diamond Films on Aluminum Nitride Ceramics

廖源
1999-01-01
Abstract:Diamond films were successfully synthesized on aluminum nitride(AlN) ceramic substrates by hot filament chemical vapor deposition(HFCVD) method. It is notices that the thermal conductivity of the diamond film/aluminum nitride ceramic(DF/AlN) composite has reached 2. 04 W/ cm.K, 73 % greater than that of AlN ceramic. Compared with the measurement of scanning electron microscopy(SEM) and Raman spectroscopy, the influence of diamond films on the thermal conductivity of the composites was pointed out. The adhesion and the stresses of diamond films were also studied. The unusual stability and very good adhesion of diamond films on AlN ceramic substrates obtained are attributed to the formation of aluminum carbide.
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