A Combined Objective Lens-Energy Analyser for Electron Beam Testing of IC

TT Tang,Y Wang,XD Liu
DOI: https://doi.org/10.1093/oxfordjournals.jmicro.a023554
1998-01-01
Journal of Electron Microscopy
Abstract:A combined objective lens-energy analyser system for the electron beam (EB) testing of integrated circuits has been developed. The objective lens is a side pole-gap magnetic lens with its maximum axial flux density outside the lens body. There is a planar retarding field analyser with an accelerating grid located in the electron beam path of the lens body and the specimen is positioned near the maximum of the lens axial field. Computer simulation shows that most of the secondary electrons enter normally into the retarding field analyser and this ensures high energy resolution. The experimental S-curve which is a curve of detected secondary electron current versus the retarding grid voltage is very similar to that expected theoretically. A theoretical model is put forward concerning the local field, especially the local barrier effects.
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