Fabrication of φ1 mm stator winding of electromagnetic micro-motor

Xiaolin Zhao, Yang,Di Zhou,Chen Zhang
1998-01-01
Abstract:The fabrication of φ1 mm stator winding of electromagnetic micro-motor was researched and developed with micro-processing techniques. High aspect ratio photolithography process and mask plating process were used for high aspect ratio stator winding. The resistance of stator winding was greatly reduced. The insulation between the layers of stator winding was resolved by Al2O3 sputtering and the heat resistance of stator winding was improved.
What problem does this paper attempt to address?