Quasi-continuous coding method to enhance binary optical element diffraction efficiency

Liping Zhao,Minxian Wu,Guofan Jin,Yingbai Yan
1998-01-01
Abstract:Based on the scalar diffraction theory, the diffraction efficiency of binary optical elements (BOE) and the influence of the microstructure error on it, a quasi-continuous mask-coding (QCMC) method was presented, and the concrete mask patterns for fabricating non-2 n-step were given too. By using the available processing facilities without any additional cost or working procedure, BOE with significantly enhanced diffraction efficiency can be fabricated by using QCMC method. This method can improve the performance of any hybrid optical system and raise the image quality of the hybrid image system.
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