Abstract:Mirror-finished surface products have a wide range of applications in different engineering industries, such as power generation, aerospace, semiconductors and optics. The surface topography of mirror-finished products is typically measured in a metrology laboratory, which is typically time consuming and cannot be integrated into the manufacturing process. To allow for in-situ product quality assurance and automatic tool change for manufacturing processes, a more accurate and responsive surface-measurement method is needed. For highly polished surfaces, a sub-micron surface fluctuation makes it possible to use light-scattering effects and image processing for surface texture analysis. A non-contact surface inspection system using a fringe-patterned illumination method is proposed in this paper. A predesigned pattern was projected onto the target surface, and its reflected image was captured by a camera. It was found that the surface parameters Sa and Sq, which are widely used to evaluate surface quality, are significantly correlated with luminous-intensity distribution. Another parameter, Str, which quantifies the uniformity of surface-texture directions due to polishing or grinding marks, was traditionally quantified after a complete-surface topographic measurement. In this research, a new approach is proposed to determine surface isotropy through a luminance-intensity distribution analysis. By rotating the test coupon, the variation of specular reflection showed correlation with the significance of surface-texture direction. The experimental results demonstrate that mirror-finished surfaces with a large deviation in luminance intensity across the pattern possess low Str values, which indicates low uniformity in surface texture.

Surface plasmon spectroscopy for measuring surface roughness of metallic film

Roughness Characterization of Well-Polished Surfaces by Measurements of Light Scattering Distribution

Experimental Study of the Optimal Metal Film for Surface Plasmon Resonance

Measurement and Analysis of the Surface Roughness of Ag Film Used in Plasmonic Lithography

Efficiency of emission from surface plasmon waves of Ag films for different pre-coated layers

Enhanced Backward Scattering by Surface Plasmons on Silver Film

Analysis of surface-plasmon-polaritons-assisted interference imaging by using silver film with rough surface.

Measurement Of Surface Roughness By Reflected Interference Spectrum

Study and Numerical Simulation of a Surface Plasmon Resonance Sensor Using Bi-Beam Differential Measurement Approach

Influence of Surface Roughness on Surface Plasmon Resonance Phenomenon of Gold Film

Observation Of Surface-Plasmon-Polariton Transmission Through A Silver Film Sputtered On A Photorefractive Substrate

Research on New Technology of Surface Roughness Measurement

Computer simulation and experiment for surflace roughness measurement using speckle images

Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

Surface Topography Measurement of Mirror-Finished Surfaces Using Fringe-Patterned Illumination

Angle dependent localized surface plasmon resonance from silver nanoparticles embedded in SiO2 thin film

Non-Contact Surface Roughness Measurement by Implementation of a Spatial Light Modulator

Real-Time Measurement of Surface Roughness Based on Dynamic Speckles

Roughness parameters for standard description of surface nanoarchitecture

Thickness Measurement of Bimetallic Film Using Surface Plasmon Resonance Holographic Microscopy.

Diffraction-based tracking of surface plasmon resonance enhanced transmission through a gold-coated grating