Study on large scale 3-D laser dynamic scanning manufacturing systems
Donghua LI,Leimin DENG,Jun DUAN,Xiaoyan ZENG,Xinyi YOU
DOI: https://doi.org/10.7510/jgjs.issn.1001-3806.2016.04.002
2016-01-01
Abstract:In order to meet the requirements of increasing precision, processing size and processing efficiency of 3-D laser micromachining, after theoretical analysis and calculation, a dynamic focusing system was designed combining the dynamic focusing lens with the 2-D galvanometer scanning system. A large scale 3-D laser dynamic focusing scanning processing system was proposed with the combination of the dynamic focusing system and a high precision X-Y-Z 3-D working stage. Telecentric f-θ lens was designed with focal length of 100mm, field angle of ± 15°, aperture size of 7mm, back focal length of 137mm and relative distortion of less than 0. 5%. And a dynamic focusing system was designed with aperture size of 8mm, optical leverage ratio of 1:8 and back focal length of 800mm ± 40mm. ZEMAX was used to analyze and evaluate the optical design and system performance of the dynamic focusing lens and telecentric f-θ lens. The results show that, after layer stitching with the process control software, large-scale (460mm × 310mm × 50mm) 3-D dynamic focusing precision UV laser micromachining system is achieved. In 3-D scanning range, laser beam spot diameter remains always less than 10μm and meets the needs of large-scale 3-D precision laser micromachining.