Characteristics of oxygen sensitivity of TiO2 thin film

Hongjun Yao,Rongchang Wang,RuiFen Rong,Fei Xu,Haiyan Jin
1997-01-01
Abstract:The ability of metal oxides (such as zirconia, titania, etc.) to change their electric conductivity on variations of the partial pressure of oxygen has been utilized for development of oxygen sensors. Traditional sensors are mostly made from bulk or thick film materials, which need high working temperature. The objective of this paper is to describe the change of the height of Schottky barriers at the surface of titania when the partial pressure of oxygen changed. The properties of this Schottky diode are measured and the mechanism is discussed.
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