Synthesis and characterization of TiO2 nanotubes for humidity sensing

Yanyan Zhang,Wuyou Fu,Haibin Yang,Qi Qi,Yi Zeng,Tong Zhang,Ruixia Ge,Guangtian Zou
DOI: https://doi.org/10.1016/j.apsusc.2008.02.106
IF: 6.7
2008-06-01
Applied Surface Science
Abstract:The highly ordered TiO2 thin films are prepared by anodic oxidation and calcined at 300, 400, 500 and 600°C, respectively. X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) are employed to analyze the structure and the morphology of the TiO2 films. We design a novel sensor to investigate the humidity sensing behaviours of the samples. The samples calcined at 600°C show high sensitivity with nearly two orders change in the resistance and short response and recovery time (<190s) during the relative humidity variation from 11 to 95%.
chemistry, physical,physics, applied, condensed matter,materials science, coatings & films
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