Characterization of Nanostructured Titania Thin Film and Its Application in Gas Sensor

Guanrong Tang,Jing Chen
DOI: https://doi.org/10.4028/www.scientific.net/amm.289.45
2013-01-01
Applied Mechanics and Materials
Abstract:In this paper, Nanostructured Titania (NST) was fabricated by aging titanium film in hydrogen peroxide solution. NST was analyzed and characterized using scanning electron microscope (SEM), X-ray photoelectron spectroscopy (XPS), energy-dispersive X-ray spectroscopy (EDX), X-ray diffraction (XRD), nano-indentation method and the BET method. Results showed that NST was porous TiO2 with pore diameter of 90-133 nm, hardness of 1.35Gpa, and specific surface area of 37.26 m2/g. Gas sensors using NST film as sensitive material were presented in this paper too. Electrodes were deposited upon NST patterns to create electrical connections. Gas sensors with a simple package were successfully fabricated.
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