Humidity sensor of Pt/TiO2 diode

Deming Sun,Mengqiu Xiao,Rongchang Wang,RuiFen Rong
1999-01-01
Abstract:Platinum is often used as the contact material of metal-oxide based semiconductor gas sensors. At room temperature, the electronic conductivity across the Pt/TiO2 interface leads to extremely sensitive Schottky-barrier humidity sensors. The mechanism is that the change of the height of Schottky-barrier at the interface of Pt and TiO2 altered by the chemisorption of water leads to the drift of I-V characteristic curve. The properties of such a Pt/TiO2 humidity sensor are described, and the related fabrication problems are also discussed.
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