Abstract:Yttria-stabilized zirconia (YSZ) thin films on polycrystalline substrates were grown by cold-wall aerosol-assisted metallorganic chemical vapor deposition (MOCVD) at the temperatures of 673-1233 K using metal beta-diketonate chelates as precursors. Thin uniform films with amorphous structure were obtained below 673 K; when the deposition temperature increases to 773-1023 K, YSZ films appear to be a mixture of cubic and monoclinic phases; single cubic YSZ phase can be obtained at deposition temperature above 1023 K. The Y/Zr atom ratio estimated from the corresponding X-ray photoelectron spectroscopy peaks is less than the feed ratio, which can be interpreted by different transfer resistance of Y and Zr intermediates diffusing to the substrate surface. The films obtained at 673-1023 K possess a layer structure originated from low mobility of the absorbed species. Along with the increase of the deposition temperature, the grains become mature and larger, and then unite with each other to form a continuous columnar film. Mass transport dominates the growth process within lower temperatures, and homogeneous reaction will interrupt the growth at increasingly high temperatures. Growth rate expression with respect to temperature, pressure, gas flow rate, and metal concentration of precursor solutions was deduced assuming deposition of mass-transport limited mechanism, which is consistent with the experimental results. (c) 2005 The Electrochemical Society. All rights reserved.

Study on synthesis, characterization, stability and sublimation behavior of yttrium (III) dipivaloylmethane chelate

Synthesis and Characterization of Volatile Metal Β-Diketonate Chelates of M(DPM)n (m=ce, Gd, Y, Zr, N=3,4) Used As Precursors for MOCVD

Synthesis and characterization of Sm(DPM)3 used as precursor for MOCVD

Synthesis, Characterization, and Kinetic Study of Mn(DPM)3 Used As Precursor for MOCVD

Formation and Rate Processes of Y[sub 2]o[sub 3] Stabilized ZrO[sub 2] Thin Films from Zr(DPM)[sub 4] and Y(DPM)[sub 3] by Cold-Wall Aerosol-Assisted MOCVD

Synthesis and Characterization of Pr(DPM)3 Served As Precursor for MOCVD

Deposition of Y2O3 stabilized ZrO2 thin films from Zr(DPM)4 and Y(DPM)3 by aerosol-assisted MOCVD

Formation and Rate Processes of Y2o3 Stabilized Zro2 Thin Films from Zr(Dpm)(4) and Y(Dpm)(3) by Cold-Wall Aerosol-Assisted Mocvd

Fabrication and Characterization of Y2O3 Stabilized ZrO2 Films Deposited with Aerosol-Assisted MOCVD

Synthesis of YSZ film by solid single source PE-MOCVD method and characterization

Study of Thermodynamics and Experiment on Direct Synthesis of Dimethyl Carbonate from Carbon Dioxide and Methanol over Yttrium Oxide

Yttrium(III) Complexes with Carbamide and Dimethylacetamide: Composition, Structure, and Thermal Decomposition

Dynamic Evaporation Behaviour of Diketonate Compounds of Yttrium, Copper and Barium

Mass Transport Of Beta-Diketonate Precursors For Mocvd Of Yba2cu3o7-Delta High T-C Superconducting Thin Films

Kinetics of Thermal Decomposition of Yttrium and Samarium Hydroxides and Sm(OH)3@Y(OH)3 Compound with a Core–Shell Nanostructure

Synthesis and Volatility Characterization of Mo(II) and W(II) Compounds for Thin Films

Synthesis and thermogravimetric analysis of monoclinic yttrium citrate dihydrate

Synthesis and Structure of Monocyclopentadienylyttrium(iii) Dichloride Tris(tetrahydrofuran)

Identification of Yb and Ce complexes containing 2,2,6,6-tetramethyl-heptane-2,4-dionate ligand: Syntheses, structures and calculations

Water Assisted Atomic Layer Deposition of Yttrium Oxide Using Tris(n,n'-Diisopropyl-2dimethylamido-guanidinato) Yttrium(iii): Process Development, Film Characterization and Functional Properties

Y(OH)3 and Y2O3 with Novel Structures: Formation and Mechanism