Abstract:In this paper, we demonstrate silicon-on-insulator (SOI) channel waveguides with propagation loss and $r$ = 10 $\mu$$\text{m}$ bends with bending loss as low as 2 dB/cm and 0.02 dB/90 $^{\circ }$ in the broad wavelength range of 3.68–3.88 $\mu$ $\text{m}$. We also indicate the limitation of SOI waveguide loss in mid-infrared wavelength by analyzing loss mechanisms. Based on this high-performance mid-infrared waveguide, we systematically analyze the coupling efficiency of various directional couplers, which are critical and commonly used building blocks for on-chip light routing and power splitting. By varying coupling length and sweeping wavelength, the performance of directional coupler with various gap separations is meticulously investigated in 3.68–3.88 $\mu$ $\text{m}$. A experimental database for directional coupler with any power splitting ratio is provided. Our results offer a promising broadband platform for dense wavelength division multiplexing (DWDM) and applications that require precise control of coupling such as racetrack resonator in the mid-infrared region.

Fabrication of silicon-on-insulator (SOI) wavelength demultiplexer

Etched-Diffraction-Grating-Based Planar Waveguide Demultiplexer on Silicon-on-Insulator

Fabrication of SOI directional coupler

Design and Fabrication of the Star Coupler Based on SOI Material

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Turning-Mirror-Integrated Arrayed-Waveguide Gratings on Silicon-on-Insulator

Silicon-on-insulator-based Optical Demultiplexer Employing Turning-Mirror-integrated Arrayed-Waveguide Grating

Silicon-on-Insulator-Based Compact Optical Demultiplexer Employing Etched Diffraction Grating

Silicon Two-Mode Multi/demultiplexer Based on Tapered Couplers

SOI Waveguides Fabricated by Wet-Etching Method

Study of Silicon-on-glass Waveguides

Fabrication Of Integrated Waveguide Turning Mirror On Silicon-On-Insulator

Fabrication of Silicon Photonic Devices by Utilizing Industrial CMOS Technology

Integrated Reconfigurable Microring Based Silicon Wdm Receiver for On-Chip Optical Interconnect

Long-wave infrared 1 × 2 MMI based on air-gap beneath silicon rib waveguides.

Three-mode All-Optical (de)multiplexing on a SOI Chip

Design of AWG Demultiplexer with TIR Mirrors Based on SOI Material

SOI Based Optical Waveguide Devices with 44gbit/s High Speed

Fabrication of silicon-on-glass waveguides

Design and Fabrication of Multimode Interference Coupler with Strong Confinement Structure on Silicon-On-Insulator