Abstract:To accurately measure the surface roughness of precision parts, this paper proposes a non-destructive measurement method of surface roughness using frequency-domain interferometry as the core detection principle and the Hanning window energy center method as the signal demodulation method. The corresponding relationship between the height changes of the sample surface profile and the frequency density changes in the interference signal was established, and the Hanning window energy center method was used to accurately extract the periodic frequency, which can more accurately measure the surface roughness of the sample. After the spectrum correction method, the peak signal-to-noise ratio of the system reaches 50∼60 dB. When the signal-to-noise ratio is 54.8, the theoretical measurement accuracy of the system reaches 5 nm. The vibration error generated during the actual measurement process is only 20 nm. The measurement results of the roughness measuring instrument were compared and analyzed. The experimental results showed that this system has higher measurement accuracy and accuracy, and the maximum repeatability error is 7 nm. To further verify the accuracy of the system, an atomic force microscope was used for comparison and verification. The difference between the two measurement results was 12 nm. This work provides a faster and more accurate non-destructive measurement method for surface roughness measurement.

Research on optical heterodyne interference fiber surface roughness sensor

A Measurement System for the Roughness of Ultra Smooth Surface with Large Aperture

Research of a Reflective Fiber-Optic Displacement Sensor with Intensity Compensation

A Laser Heterodyne Interferometer For Measuring Surface-Roughness

Nanometrology of an Ultraprecision Machined Surface by Using Optical Sensors

Actively stabilized optical fiber interferometry technique for online/in-process surface measurement.

An Optical Orthogonal Heterodyne Demodulation Technology for Interferometric Fiber-optic Sensor

An Optical Fiber Heterodyne Interferometry Displacement Sensor.

Effects of surface roughness on optical properties and sensitivity of fiber-optic evanescent wave sensors

Real Time Measurement of Surface Roughness Using Laser Technique

Influence of light intensity on measurement accuracy of laser diode multiplexing optical fiber displacement sensor

Multiplexing Optical Fiber Displacement Sensor Based on Heterodyne Interference with Frequency-Modulated Laser Diode

Non-Contact Surface Roughness Measurement by Implementation of a Spatial Light Modulator

Micro-vibration measuring technology based on heterodyne interference

Vibration Compensating Beam Scanning Interferometer for Surface Measurement

Nanoscale surface roughness measurement based on frequency-domain interferometry principle

An Optical Fiber Pressure Sensor Based on F-P Interferometry and Intensity Demodulation

Multiplexing technique of optical fiber displacement sensor based on heterodyne interference with frequency-modulated semiconductor laser

Optical Fiber Sensor for Curvature and Temperature Measurement Based on Anti-Resonant Effect Cascaded with Multimode Interference

Design and Operation of a Transmissive Plastic Fiber Optical Displacement Sensor

Quasi-distributed frequency-modulated continuous-wave reflectometric optical fiber strain sensor