Numerical simulation of return flow in MOCVD reactor

Jiawen Zhang,Hongkai Gao,Jikang Zhang,Yong Yang
1994-01-01
Abstract:In a MOCVD reactor, very pronounced return flow may develop due to sudden heating of cold gas, which impairs the abruptness of junction. The Numerical calculations on gas flow are performed based on the differential equations for the conservation of mass, energy and momentum using stream function vortex method. The results show that the occurrence of return flows can be eliminated by increasing gas flow and decreasing reactor pressure.
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