Abstract:A new piezoelectric actuated nonlinear mass sensor is proposed by using the snap-through phenomenon of a compressed bistable beam to enhance the sensitivity and resolution, which can be used to weigh or detect threshold mass by tracking the bifurcation frequency shift. According to the nonlinear finite element modeling technique, the nonlinear dynamic response of the combined nonlinear structure is numerically calculated, which shows that the bifurcation point can be accurately identified by the sharp and great amplitude change regardless of the damping effect, thus providing an effective way for tracking the bifurcation frequency. Hence, the nonlinear sensitivity depicted by the bifurcation frequency shift per unit mass can reach 3.3 times the sensitivity of linear mass sensors having the same size. Also, as a mass switch, the response amplitude jumps sharply when the added mass is greater than or equal to the threshold value, which is dependent on the excitation frequency. Meanwhile, the influences of the beam compression and excitation voltage on the sensitivity and minimum detectable mass were obtained for sensor optimization. For concept validation, a macro-sized nonlinear mass sensor was fabricated with the geometric size of 58.0 mm long and 4.0 mm wide, and the experimental results show that the sensitivity is around 575.0 Hz/g compared with the simulated sensitivity of 542.0 Hz/g. For a mass switch, the minimum threshold mass is 0.2 mg. The fair agreement between the simulation and experiments adequately validated the proposed nonlinear bistable mass sensor. Published by AIP Publishing.

A Novel V-Shaped Cross Section Cantilever Sensor for Monitoring Concentrated Masses with Improved Detecting Sensitivity and Measuring Accuracy

A new sensitivity improving approach for mass sensors through integrated optimization of both cantilever surface profile and cross-section

Design and Analysis of Micro-Mass Sensor Based on I-shaped Cross-Section Cantilever

A New Sensitivity-Improving Method for Piezoelectric Resonance Mass Sensors Through Cantilever Cross-Section Modification

Design and Analysis of Micro-Mass Sensor Based on Trapezoidal Variable Cross-Section Cantilever

Analytical modeling of a magnetically affected cantilever nanoplate-based mass detector

Mass Detection in Viscous Fluid Utilizing Vibrating Micro- and Nanomechanical Mass Sensors under Applied Axial Tensile Force

A Self-Sustained Mass Sensor with Physical Closed Loop Based on Thermal-Piezoresistive Coupled Resonators

Method to Further Improve Sensitivity for High-Order Vibration Mode Mass Sensors with Stepped Cantilevers

Resonance frequency and mass identification of zeptogram-scale nanosensor based on the nonlocal beam theory.

Ultra-sensitive Analysis of a Cantilevered Single-Walled Carbon Nanocone-Based Mass Detector.

Mode-localized cantilever array for picogram order mass sensing

A Mass-Position Sensing Scheme Using a Geometrically Adjustable Resonator With Low-Order Modals for Detecting Multiple Analytes

Net-overhang Coupled Microcantilevers for Sensitive Mass Detection

A Mass Sensing Technology Based on a Dynamic Microcantilever in Liquid

Enhanced Sensitivity of Mass Detection Using the First Torsional Mode of Microcantilevers

Mass Detection by Means of the Vibrating Nanomechanical Resonators

A Nonlinear Resonant Mass Sensor With Enhanced Sensitivity And Resolution Incorporating Compressed Bistable Beam

A Smart Resonating Micro-Cantilever in MEMS Gas Sensor: Improved Design

A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air

High-mode resonant piezoresistive cantilever sensors for tens-femtogram resoluble mass sensing in air