Abstract:This paper presents an analytical model to study the structural effects of a capacitive tactile sensor array on its capacitance changes and sensitivities. The tactile sensor array has 8 x 8 sensor units, and each unit utilizes the truncated polydimethylsiloxane (PDMS) pyramid array structure as the dielectric layer to enhance the sensing performance. To predict the capacitance changes of the sensor unit, it is simplified into a two-layered structure: upper polyethylene terephthalate (PET) film and bottom truncated PDMS pyramid array. The upper PET is modeled by a displacement field function, while each of the truncated pyramids is analyzed to obtain its stress-strain relation. Using the Ritz method, the displacement field functions are solved. The deformation of the upper electrodes and the capacitance changes of the sensor unit can then be calculated. Using the developed model, the structural effects of the truncated PDMS pyramid array and the PDMS bump on the capacitance changes and sensitivities are studied. To achieve the largest capacitance changes, the dimensions have been optimized for the sensor unit. To verify the developed model, we have fabricated the sensor array, and the average sensitivities of the sensor unit to the x-, y-, and z-axes force are 0.49, 0.50, and 0.32% mN(-1), respectively, while the model predicted values are 0.54, 0.54, and 0.35% mN(-1). Results demonstrate that the developed model can accurately predict the sensing performance of the sensor array and could be utilized for structural optimization.

Design and Analysis of Micro-Mass Sensor Based on Trapezoidal Variable Cross-Section Cantilever

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Analysis and Amelioration about the Cross-Sensitivity of A High Resolution Moems Accelerometer Based on Diffraction Grating

Piezoresistive Slot-Cantilever Type Accelerometer Inspired from Spider'S Slit Sensilla

Identification of Geometric Parameters Influencing the Impedance Sensitivity of Piezoelectric Mass Sensors

An Analytical Model for Studying the Structural Effects and Optimization of A Capacitive Tactile Sensor Array

A Modified Analytical Model to Study the Sensing Performance of a Flexible Capacitive Tactile Sensor Array

Structural Design and Testing of a Micromechanical Resonant Accelerometer

Design and Optimization of Laminated Piezoresistive Microcantilever Sensors

Vacuum-assisted piezoelectric cantilever mass sensor performance

Net-overhang Coupled Microcantilevers for Sensitive Mass Detection

Design of a Hybrid Micro/Nano Cantilever-based Resonant Sensor and its Fabrication Method

Design and Analysis of a PZT-based Micromachined Acoustic Sensor with Increased Sensitivity

High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection

A High-Performance Micromachined Piezoresistive Accelerometer with Axially Stressed Tiny Beams

A Smart Resonating Micro-Cantilever in MEMS Gas Sensor: Improved Design

Ultrasensitive mass detection using dual-microcantilevers coupled by cruciform overhang

Design and characterization of high-sensitivity cantilevers

A micromachined resonant accelerometer

A Mass Sensing Technology Based on a Dynamic Microcantilever in Liquid