Abstract:For piezoelectric cantilever mass sensors, the sensitivity depicting model is of great importance for guiding the sensor design and the corresponding measuring strategy. For example, the existed frequency based sensitivity model evaluated by the frequency shift has inspired a great many structure design methods, and also resulted in very complex frequency sweeping and data acquisition procedures for tracking resonant frequency. The newly proposed simplified method of monitoring impedance change at a fixed frequency from Xu and Mutharasan has been experimentally validated to be effective and superior in sensitivity in hash environments. However, the corresponding sensitivity model has not been established for further enhancing the sensor performances. In this paper, a sensitivity model considering the mechanical-electrical coupling effects is established for evaluating the impedance variation induced by masschange at a fixed frequency. Importantly, the complex relationship among the exciting frequency, geometrical parameters, and resulted impedance has been theoretically constructed, with which, the structure and control parameters including the fixed exciting frequency and the linear impedance-frequency range can be optimized and adjusted for different applications. A macro-sized cantilever sensor of 26.0 mm long is fabricated, and the measured impedance sensitivity is almost 55.9 times greater than the resonant frequency based sensitivity. Thus, the effectiveness of the impedance based method is adequately verified for the cases where frequency based method fails.

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