Parylene-based 3D high performance folded multilayer inductors for wireless power transmission in implanted applications

XuMing Sun,Yang Zheng,Xuhua Peng,Xiuhan Li,Haixia Zhang
DOI: https://doi.org/10.1016/j.sna.2013.12.038
2014-01-01
Abstract:•Parylene-based folded multilayer stacked MEMS inductors with Ni80Fe20 soft magnetic core are fabricated.•The novel folding and bonding process can use simple single-layer micro fabrication to realize multilayer coils.•Using the multilayer structure, the performance of MEMS inductors is enhanced significantly.•Using this MEMS inductor as the receiver, the wireless power transmission system has been set up and tested.•The WPT system can successfully power implanted MEAs for neural prosthesis as well as commercial LEDs.
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