Abstract:In the past few decades, silicon (Si) complementary metaloxide-semiconductor (CMOS) field-effect transistors have been scaled exponentially over time for the demand of drive current enhancement and cost reduction.As the technology node advances into sub-20 nm regimes, Si CMOS encounters immense challenges from both processing and theoretical perspectives.To maintain or further improve the transistor performance, Ge-based electronic transistors are explored as Ge exhibits higher hole and electron mobilities.As compared with the Si CMOS process, the process for fabricating high performance Ge-based transistors is still under development.This special issue aims to address some of the challenges encountered in the state-of-the-art technology, for both the Si-and Ge-based electronic transistors.For Ge MOSFETs, interface engineering and gate dielectric engineering are necessary to reduce the electrical active defects in the Ge surface and the high-/Ge interface.Other than Ge, SiGe is another possible channel material for the future CMOS technology.SiGe could be obtained by directly growing on Si substrate and therefore it has better compatibility with Si CMOS technologies.Besides the research works on Ge-based transistors, this special issue also includes some papers on the Si lateral diffused MOS (LDMOS).Novel structural designs were demonstrated to improve the performance and reliability of the Si LDMOS.Last but not least, this issue also reports a work on increasing the responsivity of the Si n-MOSFET photodetectors.We hope that readers of this special issue will find not only the accurate and most updated data in the papers, but also important solutions for the existing issues in the theory and fabrication of Si-and Ge-based electronic transistors.

Impact of Various Silicide Techniques on SiGe Source–drain Series Resistance and Mobility of Pmosfets

Impact of the Si Content on the Electrical Properties of NiSi x Ge 1– x Source/Drain Contact Metal for Ge pMOSFETs

The Influence of Silicide Technique on the Device Performance for Deep Sub-Micro Pmosfets

Performance Comparison Between Si and Ge pDG-FETs for Different Channel Lengths Based on Hole Transport Simulation

Nige Metal Source/Drain Ge Pmosfets For Future High Performance Vlsi Circuits Applications

Nickel-Based Contact Metallization For Sige Mosfets: Progress And Challenges

Ge CMOS Technology with Advanced Interface and Junction Engineering.

Physical mechanism determining Ge p- and n-MOSFETs mobility in high Ns region and mobility improvement by atomically flat GeOx/Ge interfaces

Study on the Impact of Germanium Preamorphization on the Work Function of Fully Silicided NiSi Gate

Si- and Ge-Based Electronic Devices

Mobility Enhancement Techniques for Ge and GeSn MOSFETs

High Mobility CMOS Technologies Using III-V/Ge Channels on Si Platform

Study on the impact of Ge-implantation on the work function of fully silicided NiSi gate as ultra-shallow junction formed by using germanium preamorphization

The Leakage Current Improvement of a Ni-Silicided SiGe/Si Junction Using a Si Cap Layer and the PAI Technique

Nano-scale Si-capping Thicknesses Impacting Junction Performance on <110> Silicon Substrate

Study on the application of silicide in surface micromachining

Alloying Effects in Ni Silicide for CMOS Applications

On Different Process Schemes for MOSFETs with a Controllable NiSi-Based Metallic Source/Drain

Impact of high mobility III‐V compound material of a short channel thin‐film SiGe double gate junctionless MOSFET as a source

Effect of SiGe-Composite Placement on Quantum Effects of a Nanowire FET Using NEGF

Investigation of Ultrathin Ni Germanosilicide for Advanced pMOS Contact Metallization