Phase retrieval technology for off-axis ellipsoid surface test with a high dynamic range algorithm

Chao Xie,Shengyi Li,Linyan Ding,Shangyong Chen
DOI: https://doi.org/10.1016/j.ijleo.2012.09.026
2013-01-01
Abstract:Phase retrieval technology for off-axis ellipsoid surface measurement with a high dynamic range algorithm is proposed in this paper. A high dynamic range algorithm (HDRA) for phase retrieval is proposed. We proved the validity of it in simulation. Then the HDRA is used to measure an off-axis ellipsoid. The measurement setup was established and the HDRA was applied to retrieve the surface shape of the off-axis ellipsoid. The experimental results show that the phase retrieval results are good agreement with that obtained by interferometer, which confirms the validity of this method.
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