Abstract:Photosensitive TiO 2 /organically modified silane organic–inorganic hybrid thin films were synthesized by combining a low-temperature sol–gel process with a spin-coating method. Optical transmittance properties and the photochemical activities of the planar hybrid films were characterized by UV–Visible spectroscopy and Fourier transform infrared spectroscopy. Advantages for fabrication of the concave micro-lens arrays (MLAs) based on the photosensitive hybrid films were demonstrated by using the replicated polydimethylsiloxane (PDMS) soft mold as the imprint mold and a UV soft imprint technique. Morphological and surface profile properties of the master, the PDMS soft molds and the as-fabricated sol–gel concave MLAs were observed by scanning electron microscopy and laser confocal scanning microscopy. Contact angles of water on the PDMS soft molds baked at different temperatures were studied. Optical imaging properties of the as-fabricated concave MLAs were confirmed by a self-made optical test system. Results indicate that the as-prepared photo-patternable hybrid materials have great applicability for the fabrication of photonic components, thus providing an effective method to fabricate concave MLAs based on the as-synthesized hybrid films by combining the UV-cured imprint technique with the replicated PDMS soft mold, which has advantages of simplicity, cost-effective and mass production and potential application in industry production.

Concave micro-lens arrays fabricated from the photo-patternable GeO 2/ormosils hybrid sol-gel films

Sol–gel concave micro-lens arrays fabricated by combining the replicated PDMS soft mold with UV-cured imprint process

Fabrication of micro-lens arrays built in photosensitive hybrid films by UV-cured imprinting technique

Optical Properties of Highly Photosensitive Hybrid Sol-Gel Films

Photo-patternable GeO_2-contained Organic-Inorganic Hybrid Sol-Gel Films for Photonic Applications

Elliptical Concave Microlens Arrays Built in the Photosensitive TiO2/ormosils Hybrid Films

One-step Fabrication of Achromatic Spherical Microlens Array on Enzyme Etched Gelatin Film

GeO2/organically Modified Silane Sol-Gel Hybrid Organic-Inorganic Films for Photonic Applications

Multifunctional TiO2/ormosils Organic-Inorganic Hybrid Films Derived by a Sol-Gel Process for Photonics and UV Nanoimprint Applications

Versatile Route To Gapless Microlens Arrays Using Laser-Tunable Wet-Etched Curved Surfaces

Photo-Responsive Properties And Heating-Induced Surface Relief Patterns From Azobenzene-Doped Geo2/Gamma-Glycidoxypropyltrimethoxysilane Organic-Inorganic Hybrid Films

Optical Isomerization and Photo-Patternable Properties of GeO2/Ormosils Organic-Inorganic Composite Films Doped with Azobenzene

Refractive Microlensarray Made of Silver-Halide Sensitized Gelatin (shsg) Etched by Enzyme with Slm-Based Lithography

Fabrication of Nanoporous Arrays from Photosensitive Organic-Inorganic Hybrid Materials by Using an Uv Soft Nanoimprint Technique

Preparation and optical properties of sol–gel derived photo-patternable organic–inorganic hybrid films for optical waveguide applications

Surface Relief Micro-Optical Elements Built in Hybrid Sol-Gel Glass

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Hybrid sample-inverted reflow and soft-lithography technique for fabrication of conicoid microlens arrays.

Refractive Micro Lens Array Made of Dichromate Gelatin with Gray-Tone Photolithography

Development of SiO2 UV-curable materials and their fine-patterning using sol-gel method

Single-Step Fabrication Of Continuous Surface Relief Micro-Optical Elements In Hybrid Sol-Gel Glass By Laser Direct Writing