Abstract:Integrated photonics provides a miniaturized and potentially implantable platform to manipulate and enhance the interactions between light and biological molecules or tissues in in-vitro and in-vivo settings and is thus being increasingly adopted in a wide cross-section of biomedical applications ranging from disease diagnosis to optogenetic neuromodulation. However, the mechanical rigidity of substrates traditionally used for photonic integration is fundamentally incompatible with soft biological tissues. Cytotoxicity of materials and chemicals used in photonic device processing imposes another constraint towards these biophotonic applications. Here we present thin film TiO 2 as a viable material for biocompatible and flexible integrated photonics. Amorphous TiO 2 films were deposited using a low temperature (<250 °C) sol-gel process fully compatible with monolithic integration on plastic substrates. High-index-contrast flexible optical waveguides and resonators were fabricated using the sol-gel TiO 2 material and resonator quality factors up to 20,000 were measured. Following a multi-neutral-axis mechanical design, these devices exhibit remarkable mechanical flexibility and can sustain repeated folding without compromising their optical performance. Finally, we validated the low cytotoxicity of the sol-gel TiO 2 devices through in-vitro cell culture tests. These results demonstrate the potential of sol-gel TiO 2 as a promising material platform for novel biophotonic devices.

Multifunctional TiO2/ormosils Organic-Inorganic Hybrid Films Derived by a Sol-Gel Process for Photonics and UV Nanoimprint Applications

Optical Properties of Highly Photosensitive Hybrid Sol-Gel Films

Preparation and optical properties of patternable TiO2/ormosils hybrid films for photonics applications

Photo-Responsive Properties of Azobenzene Small Molecules in Sol-Gel Hybrid Tio2/Ormosil Organic-Inorganic Matrices

Fabrication of micro-lens arrays built in photosensitive hybrid films by UV-cured imprinting technique

Preparation and optical properties of sol–gel derived photo-patternable organic–inorganic hybrid films for optical waveguide applications

Preparation and Trans – Cis Isomerization of Azobenzene-Containing TiO 2 /ormosils Hybrid Films Derived at a Low Temperature Sol–gel Process for Photonic Applications

Optical Isomerization and Photo-Patternable Properties of GeO2/Ormosils Organic-Inorganic Composite Films Doped with Azobenzene

Azobenzene-containing Small Molecules Organic–inorganic Hybrid Sol–gel Materials for Photonic Applications

GeO2/organically Modified Silane Sol-Gel Hybrid Organic-Inorganic Films for Photonic Applications

Preparation and optical properties of sol–gel derived organic–inorganic hybrid waveguide films doped with disperse red 1 azoaromatic chromophores

Elliptical Concave Microlens Arrays Built in the Photosensitive TiO2/ormosils Hybrid Films

Photo-Responsive Properties And Heating-Induced Surface Relief Patterns From Azobenzene-Doped Geo2/Gamma-Glycidoxypropyltrimethoxysilane Organic-Inorganic Hybrid Films

Photo-patternable GeO_2-contained Organic-Inorganic Hybrid Sol-Gel Films for Photonic Applications

Spectroscopic Investigations on Sol–gel Derived Organic–inorganic Hybrid Films for Photonics from Ormosils and Tetrapropylorthotitanate

Titania/Ormosils Organic-Inorganic Hybrid Thin Films Doped with Azobenzene Small Molecules for Optical Switch Applications

Foldable and Cytocompatible Sol-Gel Tio2 Photonics

Sol-Gel Fabrication of Low Temperature Organic-Inorganic Hybrid Film Patterns for Photonic Applications

Fabrication of Nanoporous Arrays from Photosensitive Organic-Inorganic Hybrid Materials by Using an Uv Soft Nanoimprint Technique

Concave micro-lens arrays fabricated from the photo-patternable GeO 2/ormosils hybrid sol-gel films

Sol–gel concave micro-lens arrays fabricated by combining the replicated PDMS soft mold with UV-cured imprint process