Abstract:Many high-precision optical components are made of glass, but they can also be made of a wide variety of other materials. For example, reaction-bonded silicon carbide (RB-SiC) has recently been used to make optical parts for poor working conditions due to its distinct properties such as low density, high hardness, and low thermal expansion coefficient. Thus, in order to rapidly manufacture high-precision aspherical mirrors made from RB-SiC, a novel aspheric manufacturing system equipped with magnetorheological finishing (MRF) technology is described in this paper, which incorporates a host of features and has unprecedented processing versatility. The system has four degrees of freedom, and can realize manufacture or measurement based on the Cartesian coordinate or polar coordinate systems. To achieve good surface accuracy, the polishing wheel combines self-rotation movement with corotation. The prepolishing and fine polishing processes can be done on the same machine by changing different process parameters accordingly, and the on-machine profilometer measures the aspheric forms generated during prepolishing. Experiments were carried out on the features of magnetorheological (MR) fluids by polishing a parabolic SiC mirror with a Phi 100 mm aperture. The results indicated that the required convergence speed, surface roughness, and figure accuracy can be achieved with high efficiency. The final surface roughness with an initial value of Ra = 34.39 nm reached 26.74 nm after 20 hours of prepolishing using MR fluids carrying oil (Al2O3 as the nonmagnetic particle), and then reached 1.14 nm after 50 hours of fine polishing using the MR fluid with diamond power as the nonmagnetic particle. The figure accuracy also improved to lambda 130 rms (lambda = 632.8 nm) at an arbitrary Phi 30 mm subaperture.

A New Polishing Process for Large-Aperture and High-Precision Aspheric Surface

Development of Ultra-Precision Grinding Process for Aspheric Surface Based on Feed Rate Controlling and Error Compensation Methods

Incined Magnetorheological Finishing and Its Path Controlling

Magnetorheological Finishing for Aspheric Surface with Nanometer Accuracy

Research on the magnetorheological finishing of large aperture off-axis aspheric optical surfaces for zinc sulfide

Nano-Precision Synergistic Finishing Process Integrated ELID-Grinding and MRF

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Process Technology of Aspherical Mirrors Manufacturing with Magnetorheological Finishing

Optimal strategy for fabrication of large aperture aspheric surfaces

Evaluation on the Figure Errors of Optical Aspheric Surfaces after Magnetorheological Polishing

Magnetorheological Finishing of SiC Aspheric Mirrors

Process Chain for Ultra-Precision and High-Efficiency Manufacturing of Large-Aperture Silicon Carbide Aspheric Mirrors

Research on the Magnetorheological Finishing Technology of a High-Steepness Optical Element Based on the Virtual-Axis and Spiral Scanning Path

Research on Process Technology of Off-Axis Ellipsoid Aspheric Mirror

Tilt angle correction based forming algorithm for high steepness aspheric surfaces polishing

A Method of Restraining the Adverse Effects of Grinding Marks on Small Aperture Aspheric Mirrors

Research on Precision Grinding Processing and Compensation Finishing Experiment for Mid-Large- Aperture Square Aspheric Optical Element

Research on the removal characteristics of surface error with different spatial frequency based on shear thickening polishing method

Fabrication of Large Aspheric Mirror Using Multi-Mode Polishing Based on Error Separation

Optimizing Parameters for Magnetorheological Finishing Supersmooth Surface

Mid-spatial frequency error restraint based on variable optimal angle-step trajectory strategy for the removal attenuation effect of magnetorheological finishing